Abstract

In manufacturing technology, the predominant tendency in recent years has been for machine tools, for example, turning-, milling-, and drilling-machines, to employ electrically operated actuators such as a servo-motor equipped with a ball screw. There are, however, various problems with these electric driving systems; they are excessively large-sized with complex machinery, and their application is expensive, as seen, for example, in the case of the NC-machine. In order to solve these problems, this study aims to develop a precision driving system actuated by a hy-draulic cylinder. The hydraulic driving system consists of a cylinder and four ON/OFF solenoid valves. The valves are the same as those used in a fuel injector of an automobile, which are capable of high speed switching, as fast as 1.5 ms. It was confirmed in experiments that the developed system had a moving resolution of 1.2 µm and, as a result, was applicable to a precision driving table for micro-processing.

Keywords: hydraulic driving table, on/off control system, on/off valve, precision processing, micro-processing machines